Mehrdad Rostami Osanloo

Research Scientist | Semiconductor Industry

Research Scientist at Tokyo Electron US, bridging atomic-scale physics, process engineering, and device integration in the semiconductor industry.

Atomic Layer Etch Plasma Physics Nanosheet GAA Advanced Dielectrics ML Process Modeling
Mehrdad Rostami Osanloo

Research Scientist, TEL

Research & Position

Current Role

Research Scientist / Quantum Chemist

Tokyo Electron US (2022 – Present)

Developing predictive, physics-based models for next-generation semiconductor processes, supporting advanced logic and memory nodes.

Core Research

  • Selective Atomic Layer Etch (ALE)
  • Plasma–surface interface physics
  • Nanosheet GAA architectures
  • First-principles DFT modeling
  • Machine-learned potentials

Technology Impact

Supporting the transition to sub-3 nm nodes through atomically precise material removal, improved selectivity, and defect control for nanosheet GAA transistors and 3D integration.

Key Projects

Nanosheet GAA

Nanosheet GAA Transistors

Atomically controlled thermal etch strategies for nanosheet gate-all-around architectures, enabling uniform sheet release and tight CD control for sub-3 nm logic nodes.

Cryogenic Etch

Cryogenic HAR Etch

Investigation of cryogenic plasma etch regimes for highly anisotropic profiles in extreme high-aspect-ratio structures for advanced 3D device integration.

Etch Chemistry

Etch Chemistry Design

Physics-driven exploration of etch chemistries combining first-principles modeling and kinetics analysis for next-generation etch processes.

Education

Ph.D. in Materials Physics

The University of Texas at Dallas (2019 – 2022)

I explored 2D van der Waals dielectrics as alternatives to traditional materials, identifying promising candidates for low-power, next-generation transistors through advanced first-principles calculations.

PhD Research

Selected Publications & Patent

Contact

Open to research collaborations, invited talks, and technical discussions related to computational materials science, plasma processing, and semiconductor manufacturing.